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EVS-EN 62276:2013

Single crystal wafers for surface acoustic wave (SAW) devices applications - Specifications and measuring method (IEC 62276:2012)

General information
Withdrawn from 03.01.2017
Base Documents
IEC 62276:2012; EN 62276:2013
Directives or regulations
None

Standard history

Status
Date
Type
Name
03.01.2017
Main
05.02.2013
Main
Main
EVS-EN 62276:2006
This International Standard applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.
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