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EVS-EN 62374:2007

Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films

General information
Withdrawn from 05.01.2011
Base Documents
IEC 62374:2007; EN 62374:2007
Directives or regulations
None
Standard history
Status
Date
Type
Name
05.01.2011
Main
This International Standard provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure.
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Paper
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