Back

EVS-EN 62374:2007

Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films

General information
Withdrawn from 05.01.2011
Base Documents
IEC 62374:2007; EN 62374:2007
Directives or regulations
None

Standard history

Status
Date
Type
Name
05.01.2011
Main
This International Standard provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure.
*
*
*
PDF
17.08 € incl tax
Paper
17.08 € incl tax
Browse standard from 2.44 € incl tax
Standard monitoring