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IEC 62374-1:2010

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

General information
Valid from 29.09.2010
Directives or regulations
None
Standard history
Status
Date
Type
Name
29.09.2010
Main
IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.
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