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IEC TR 63258:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

General information
Valid from 19.03.2021
Directives or regulations
None
Standard history
Status
Date
Type
Name
19.03.2021
Main
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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Paper
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