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IEC TS 62607-9-1:2021

Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

General information
Valid from 14.10.2021
Directives or regulations
None
Standard history
Status
Date
Type
Name
14.10.2021
Main
IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.
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Standard monitoring