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ISO 13083:2015

Surface chemical analysis -- Scanning probe microscopy -- Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

General information
Valid from 20.08.2015
Directives or regulations
None
Standard history
Status
Date
Type
Name
20.08.2015
Main
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
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