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ISO 14594:2014

Microbeam analysis -- Electron probe microanalysis -- Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

General information

Valid from 21.10.2014
Directives or regulations
None

Standard history

Status
Date
Type
Name
21.10.2014
Main
ISO 14594:2014 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.
It is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions.
It is not designed to be used for energy dispersive X-ray spectroscopy.

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