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ISO 14644-10:2013

Cleanrooms and associated controlled environments -- Part 10: Classification of surface cleanliness by chemical concentration

General information
Withdrawn from 04.05.2022
Directives or regulations
None

Standard history

Status
Date
Type
Name
04.05.2022
Main
01.03.2013
Main
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
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