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ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

General information
Withdrawn from 14.08.2020
Directives or regulations
None
Standard history
Status
Date
Type
Name
14.08.2020
Main
12.02.2013
Main
*
*
*
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Standard monitoring