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ISO 18114:2003

Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of relative sensitivity factors from ion-implanted reference materials

General information

Withdrawn from 11.05.2021
Directives or regulations
None

Standard history

Status
Date
Type
Name
11.05.2021
Main
14.04.2003
Main
ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

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