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ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

General information
Valid from 30.06.2022
Directives or regulations
None
Standard history
Status
Date
Type
Name
30.06.2022
Main
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
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