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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) -- Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

General information
Valid from 24.08.2020
Directives or regulations
None
Standard history
Status
Date
Type
Name
24.08.2020
Main
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
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Paper
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Standard monitoring