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ISO 23131:2021

Ellipsometry — Principles

General information
Valid from 22.04.2021
Directives or regulations
None
Standard history
Status
Date
Type
Name
22.04.2021
Main
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
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