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prEN ISO 25178-604

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023)

General information

Draft
Base Documents
ISO/DIS 25178-604; prEN ISO 25178-604
ICS Groups
17.040.30 Measuring instruments
Directives or regulations
None

Standard history

Status
Date
Type
Name
Main
prEN ISO 25178-604
09.09.2013
Main
EVS-EN ISO 25178-604:2013
This document describes the design and metrological characteristics of coherence scanning interferometry systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document can be applied to profiling measurements as well.

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Standards designation

EVS Estonian standard
EN European standard (published by an CEN or CENELEC)
EN ISO International standard adopted as an European standard
ISO International Organization for Standardization’s standard
IEC International Electrotechnical Commission’s standard
HD CENELEC’s harmonisation document
   
EVS-EN European standard implemented in Estonia
EVS-EN ISO International standard adopted in Europe and implemented in Estonia
EVS-EN ISO/IEC International standard/International electrotechnical standard adopted in Europe and implemented in Estonia
EVS-IEC International electrotechnical standard implemented in Estonia
EVS-ISO International standard implemented in Estonia
   
A, AMD amedment
+A a full standard plus the amendment
/A only amendment
COR, AC corrigendum
+COR a full standard plus the corrigendum
NA national annex
+NA a full standard plus the national annex
/NA only national annex
TS technical specification
TR technical report
CWA agreement, developed by a CEN or CENELEC
prEVS-EN (etc) draft standard
   
et the standard is in Estonian only
en the standard is in English only
et-en the standard is in Parallel text Estonian-English