ISO 22493:2008

ISO 22493:2008 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.
The vocabulary is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of the vocabulary are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.