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ISO/TS 25138:2019

Surface chemical analysis -- Analysis of metal oxide films by glow-discharge optical-emission spectrometry

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Kehtiv alates 06.08.2019
Tegevusala (ICS grupid)
71.040.40 Keemiline analüüs
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Standardi ajalugu
Staatus
Kuupäev
Tüüp
Nimetus
06.08.2019
Põhitekst
22.11.2010
Põhitekst
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
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