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EVS-EN ISO 14644-6:2008

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Cleanrooms and associated controlled environments - Part 6: Vocabulary

This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

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