Infoteenus
13.040 Õhu kvaliteet
Uued standardid
ISO 14644-14:2026
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Käsitlusala: This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
This document is not applicable to the following items:
assessment of suitability with respect to biocontamination;
testing for suitability of decontamination agents and techniques;
cleanability of equipment and materials;
requirements on design of equipment and selection of materials;
physical properties of materials (e.g. electrostatic, thermal properties);
optimizing performance of equipment for specific process applications;
selection and use of statistical methods for testing;
protocols and requirements for local safety regulations.
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
This document is not applicable to the following items:
assessment of suitability with respect to biocontamination;
testing for suitability of decontamination agents and techniques;
cleanability of equipment and materials;
requirements on design of equipment and selection of materials;
physical properties of materials (e.g. electrostatic, thermal properties);
optimizing performance of equipment for specific process applications;
selection and use of statistical methods for testing;
protocols and requirements for local safety regulations.
Alusdokumendid:
Asendab: ISO 14644-14:2016
ISO 14644-13:2026
Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration
Käsitlusala: This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels.
The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10.
The document gives general guidance on the following:
expected surface cleanliness levels;
suitability of cleaning methods;
compatibility of surfaces with the cleaning technique;
assessment of cleaning appropriateness.
The following are excluded from this document:
classification of cleaning methods;
product produced within a cleanroom;
specific surface-related cleaning methods;
detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
detailed material characteristics;
description of damage mechanisms by cleaning processes and time-dependent effects;
references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
other characteristics of particles such as electrostatic charge, ionic charges, etc.;
chemical reactions between molecular contaminants and surfaces;
microbiological aspects of surface cleanliness;
radioactive aspects of contamination;
health and safety considerations;
environmental aspects such as waste disposal, emissions, etc.;
selection and use of statistical methods.
The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10.
The document gives general guidance on the following:
expected surface cleanliness levels;
suitability of cleaning methods;
compatibility of surfaces with the cleaning technique;
assessment of cleaning appropriateness.
The following are excluded from this document:
classification of cleaning methods;
product produced within a cleanroom;
specific surface-related cleaning methods;
detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
detailed material characteristics;
description of damage mechanisms by cleaning processes and time-dependent effects;
references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
other characteristics of particles such as electrostatic charge, ionic charges, etc.;
chemical reactions between molecular contaminants and surfaces;
microbiological aspects of surface cleanliness;
radioactive aspects of contamination;
health and safety considerations;
environmental aspects such as waste disposal, emissions, etc.;
selection and use of statistical methods.
Alusdokumendid:
Asendab: ISO 14644-13:2017
Asendatud standardid
ISO 14644-14:2016
Cleanrooms and associated controlled environments -- Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Käsitlusala: ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644-1).
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
The following items are not covered by this ISO 14644-14:2016:
- assessment of suitability with respect to biocontamination;
- testing for suitability of decontamination agents and techniques;
- cleanability of equipment and materials;
- requirements on design of equipment and selection of materials;
- physical properties of materials (e.g. electrostatic, thermal properties);
- optimizing performance of equipment for specific process applications;
- selection and use of statistical methods for testing;
- protocols and requirements for local safety regulations.
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
The following items are not covered by this ISO 14644-14:2016:
- assessment of suitability with respect to biocontamination;
- testing for suitability of decontamination agents and techniques;
- cleanability of equipment and materials;
- requirements on design of equipment and selection of materials;
- physical properties of materials (e.g. electrostatic, thermal properties);
- optimizing performance of equipment for specific process applications;
- selection and use of statistical methods for testing;
- protocols and requirements for local safety regulations.
Alusdokumendid:
Asendatud: ISO 14644-14:2026
ISO 14644-13:2017
Cleanrooms and associated controlled environments -- Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
Käsitlusala: ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9 and ISO 14644-10.
The following matters of general guidance will be provided:
- expected surface cleanliness levels;
- suitability of cleaning methods;
- compatibility of surfaces with the cleaning technique;
- assessment of cleaning appropriateness.
The following will be excluded from this document:
- classification of cleaning methods;
- product produced within a cleanroom;
- specific surface-related cleaning methods;
- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
- detailed material characteristics;
- description of damage mechanisms by cleaning processes and time-dependent effects;
- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
- other characteristics of particles such as electrostatic charge, ionic charges, etc.;
- chemical reactions between molecular contaminants and surfaces;
- microbiological aspects of surface cleanliness;
- radioactive aspects of contamination;
- health and safety considerations;
- environmental aspects such as waste disposal, emissions, etc.;
- selection and use of statistical methods.
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9 and ISO 14644-10.
The following matters of general guidance will be provided:
- expected surface cleanliness levels;
- suitability of cleaning methods;
- compatibility of surfaces with the cleaning technique;
- assessment of cleaning appropriateness.
The following will be excluded from this document:
- classification of cleaning methods;
- product produced within a cleanroom;
- specific surface-related cleaning methods;
- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
- detailed material characteristics;
- description of damage mechanisms by cleaning processes and time-dependent effects;
- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
- other characteristics of particles such as electrostatic charge, ionic charges, etc.;
- chemical reactions between molecular contaminants and surfaces;
- microbiological aspects of surface cleanliness;
- radioactive aspects of contamination;
- health and safety considerations;
- environmental aspects such as waste disposal, emissions, etc.;
- selection and use of statistical methods.
Alusdokumendid:
Asendatud: ISO 14644-13:2026