Skip to main content
Back

EVS-EN ISO 14644-15:2026

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2026)

General information

Valid from 02.06.2026
Base Documents
ISO 14644-15:2026; EN ISO 14644-15:2026
Directives or regulations
None

Standard history

Status
Date
Type
Name
This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).
This document does not apply to the following: health and safety requirements; compatibility with cleaning agents and techniques; cleanability; biocontamination; specific requirements of equipment and materials for processes and products; design details of equipment.

Required fields are indicated with *

*
*
*
PDF
19.84 € incl tax
Paper
19.84 € incl tax
Browse standard from 2.48 € incl tax
Standard monitoring

Customers who bought this item also bought

Main

EVS-EN ISO 14644-7:2004

Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
Newest version Valid from 05.01.2005
Main

EVS-EN ISO 14644-1:2015

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
Newest version Valid from 05.01.2016
Main

EVS-EN ISO 14644-2:2015

Cleanrooms and associated controlled environments - Part 2: Specifications for monitoring and periodic testing to prove continued compliance with ISO 14644-1 (ISO 14644-2:2015)
Newest version Valid from 05.01.2016
Main

EVS-EN ISO 14644-3:2019

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06)
Newest version Valid from 01.11.2019