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prEN ISO 25178-607

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Design and characteristics of non-contact (confocal microscopy) instruments (ISO/DIS 25178-607:2026)

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Draft
Base Documents
ISO/DIS 25178-607; prEN ISO 25178-607
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Standard history

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This document specifies the design and metrological characteristics of confocal microscopy instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can also be applied to profiling measurements.

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