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EVS-EN 62047-1:2006

Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions

General information

Withdrawn from 03.05.2016
Base Documents
IEC 62047-1:2005; EN 62047-1:2006
Directives or regulations
None

Standard history

Status
Date
Type
Name
03.05.2016
Main
06.10.2006
Main
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

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