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EVS-EN 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

General information
Valid from 03.05.2016
Base Documents
IEC 62047-1:2016; EN 62047-1:2016
Directives or regulations
None

Standard history

Status
Date
Type
Name
03.05.2016
Main
06.10.2006
Main
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
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