Back

ISO 24688:2022

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

General information
Valid from 22.07.2022
Directives or regulations
None
Standard history
Status
Date
Type
Name
22.07.2022
Main
This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
*
*
*
PDF
67.10 € incl tax
Paper
67.10 € incl tax
Standard monitoring