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IEC TR 63258:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Üldinfo
Kehtiv alates 19.03.2021
Tegevusala (ICS grupid)
07.120 Nanotehnoloogiad
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Standardi ajalugu
Staatus
Kuupäev
Tüüp
Nimetus
19.03.2021
Põhitekst
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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