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ISO 23216:2021

Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

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Kehtiv alates 04.05.2021
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04.05.2021
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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
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