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EVS-EN 62417:2010

Semiconductor devices - Mobile ion tests for metal-oxide semiconductor field effect transistors (MOSFETs)

General information
Valid from 07.06.2010
Base Documents
IEC 62417:2010; EN 62417:2010
Directives or regulations
None
Standard history
Status
Date
Type
Name
07.06.2010
Main
This present standard provides a wafer level test procedure to determine the amount of positive mobile charge in oxide layers in metal-oxide semiconductor field effect transistors. It is applicable to both active and parasitic field effect transistors. The mobile charge can cause degradation of microelectronic devices, e.g. by shifting the threshold voltage of MOSFETs or by inversion of the base in bipolar transistors.
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