Back

EVS-EN 62047-20:2014

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

General information
Valid from 07.11.2014
Base Documents
EN 62047-20:2014; IEC 62047-20:2014
Directives or regulations
None
Standard history
Status
Date
Type
Name
07.11.2014
Main
This part of IEC 62047 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes. Hereafter, gyroscope is referred to as gyro.
*
*
*
PDF
21.60 € incl tax
Paper
21.60 € incl tax
Price: 2.40 € incl tax
Standard monitoring
Customers who bought this item also bought
Main

EVS-EN 62047-17:2015

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Newest version Valid from 05.08.2015
Main

EVS-EN 62047-16:2015

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods
Newest version Valid from 05.08.2015
Main

EVS-EN 62047-11:2013

Semiconductor devices - Micro-electromechanical devices -- Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Newest version Valid from 14.11.2013
Main

EVS-EN 62047-18:2013

Semiconductor devices - Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
Newest version Valid from 14.11.2013