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EVS-EN 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

General information
Valid from 07.11.2014
Base Documents
EN 62047-21:2014; IEC 62047-21:2014
Directives or regulations
None
Standard history
Status
Date
Type
Name
07.11.2014
Main
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
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