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ISO 18114:2021

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

General information
Valid from 11.05.2021
Directives or regulations
None
Standard history
Status
Date
Type
Name
11.05.2021
Main
14.04.2003
Main
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
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