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ISO 23131-3:2026

Ellipsometry — Part 3: Transparent single layer model

General information

Valid from 30.01.2026
Directives or regulations
None

Standard history

Status
Date
Type
Name
30.01.2026
Main
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

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