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prEN ISO 25178-603

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178‑603:2023)

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Draft
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ISO/DIS 25178-603; prEN ISO 25178-603
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None

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This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can be applied to profiling measurements as well.
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