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EVS-EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

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Kehtiv alates 02.04.2013
Alusdokumendid
ISO 14644-10:2013; EN ISO 14644-10:2013
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Standardi ajalugu
Staatus
Kuupäev
Tüüp
Nimetus
02.04.2013
Põhitekst
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices. NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface. NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.
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EVS-EN ISO 14644-14:2016

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
Uusim versioon Kehtiv alates 01.11.2016
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EVS-EN ISO 14644-9:2012

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)
Uusim versioon Kehtiv alates 05.09.2012
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EVS-EN ISO 14644-8:2013

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ISO 14644-8:2013)
Uusim versioon Kehtiv alates 05.03.2013
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EVS-EN ISO 14644-1:2015

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
Uusim versioon Kehtiv alates 05.01.2016