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EVS-EN ISO 14644-8:2013

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ISO 14644-8:2013)

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Kehtiv alates 05.03.2013
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ISO 14644-8:2013; EN ISO 14644-8:2013
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Nimetus
05.03.2013
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This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemica substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification. This part of ISO 14644 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions. This part of ISO 14644 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of this part of ISO 14644 to describe the nature of air chemical contaminants. This part of ISO 14644 does not give a classification of surface chemical contamination.
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EVS-EN ISO 14644-14:2016

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
Uusim versioon Kehtiv alates 01.11.2016
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EVS-EN ISO 14644-9:2012

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)
Uusim versioon Kehtiv alates 05.09.2012
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EVS-EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
Uusim versioon Kehtiv alates 02.04.2013
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EVS-EN ISO 14644-1:2015

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
Uusim versioon Kehtiv alates 05.01.2016