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EVS-EN 62047-19:2013

Semiconductor devices - Micro-electromechanical devices -- Part 19: Electronic compasses

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Kehtiv alates 14.11.2013
Alusdokumendid
IEC 62047-19:2013; EN 62047-19:2013
Tegevusala (ICS grupid)
31.080.99 Muud pooljuhtseadised
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Tüüp
Nimetus
14.11.2013
Põhitekst
IEC 62047-19:2013 defines terms, definitions, essential ratings and characteristics, and measuring methods of electronic compasses. This standard applies to electronic compasses composed of magnetic sensors and acceleration sensors, or magnetic sensors alone. This standard applies to electronic compasses for mobile electronic equipment.
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EVS-EN 62047-17:2015

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Uusim versioon Kehtiv alates 05.08.2015
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EVS-EN 62047-16:2015

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods
Uusim versioon Kehtiv alates 05.08.2015
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EVS-EN 62047-11:2013

Semiconductor devices - Micro-electromechanical devices -- Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Uusim versioon Kehtiv alates 14.11.2013
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EVS-EN 62047-18:2013

Semiconductor devices - Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
Uusim versioon Kehtiv alates 14.11.2013